Theoretical evaluation of the temperature field distribution in the silicon periodic nanostructures during thermal annealing | Havryliuk | Chemistry, Physics and Technology of Surface

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O. O. Havryliuk
Chuiko Institute of Surface Chemistry of National Academy of Sciences of Ukraine
Ukraine

Junior Researcher of the Department of Physics and Chemistry of Surface of Nanosystems

O. Yu. Semchuk
Chuiko Institute of Surface Chemistry of National Academy of Sciences of Ukraine
Ukraine

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Copyright (©) 2017 O. O. Havryliuk, O. Yu. Semchuk

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