Chemistry, Physics and Technology of Surface, 2011, 2 (3), 253-257.

Study on Adsorption of Volatile Metal Complexes with Organic Ligands



V. V. Krisyuk, A. E. Turgambaeva, G. I. Zharkova, P. A. Prozorov, I. K. Igumenov

Abstract


We have studied the adsorption/desorption kinetics of a number of palladium(II) volatile complexes with β-diketones and their derivatives on polycrystalline stainless steel surface. The composition of gas phase, the order of desorption and relative activation energy, and the frequency factor have been found using TPD with mass spectrometric recording of the gas phase. Physical adsorption for the entire series of compounds has been found. The most promising precursors for UV-stimulated deposition of metallic palladium films have been selected basing on the data obtained.

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Copyright (©) 2011 V. V. Krisyuk, A. E. Turgambaeva, G. I. Zharkova, P. A. Prozorov, I. K. Igumenov

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