AFM and SEM study on the morphology of SiO<sub>2</sub> nanoparticles in polishing slurries
Keywords:
polishing slurry, silica nanoparticles, AFM study, SEM study, silica solAbstract
A method is described of obtaining and investigation of the morphology of nanoparticles in concentrated aqueous slurries based on pyrogenic silica and silica sol obtained by the ion exchange technology. These results are useful for development of polishing compositions and also to establish the formation regularities of structural, chemical and electrical properties of the surface as well as for the explanation of the mechanism of chemical-mechanical polishing of semiconductor materials.References
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